Focused Ion Beam Assisted Etching of Aluminum.
- 期刊名称Journal of the Japan Society for Precision Engineering
- 作者Itoh, Fumikazu; Azuma, Junzou; Haraichi, Satoshi; Shimase, Akira
- 卷第59卷
- 期第9期
- 印刷ISSN0912-0289
- 电子ISSN1882-675X
- 文件大小1059.98KB
- 发表时间1993
- DOI10.2493/jjspe.59.1531
- 页码1531-1536
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