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The adsorption and surface reaction of SiCl4 on Si(100)-(2 × 1)

The adsorption and surface reaction of SiCl4 on Si(100)-(2 × 1)

Q. Gao; Z. Dohnalek; C.C. Cheng; W.J. Choyke; J.T. Yates Jr.

作者Q. Gao; Z. Dohnalek; C.C. Cheng; W.J. Choyke; J.T. Yates Jr.
卷第302卷
文件大小836.94KB
发表时间1994
DOI10.1016/0039-6028(94)91091-x
页码1-9

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