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Dynamics and control of the Czochralski process III. Interface dynamics and control requirements

Dynamics and control of the Czochralski process III. Interface dynamics and control requirements

Michael A. Gevelber

作者Michael A. Gevelber
卷第139卷
印刷ISSN0022-0248
文件大小1340.23KB
发表时间1994
DOI10.1016/0022-0248(94)90177-5
页码271-285

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