Design and operating characteristics of a metalorganic vapor phase epitaxy production scale, vertical, high speed, rotating disk reactor
- 作者G.S. Tompa; P.A. Zawadzki; K. Moy; M. McKee; A.G. Thompson; A.I. Gurary; E. Wolak; P. Esherick; W.G. Breiland; G.H. Evans; N. Bulitka; J. Hennessy; C.J.L. Moore
- 卷第145卷
- 印刷ISSN0022-0248
- 文件大小659.70KB
- 发表时间1994
- DOI10.1016/0022-0248(94)91122-3
- 页码655-661
SPA Monitoring of GaN Movpe SurfaceKobayashi, Naoki; Kobayashi, Yasuyuki · MRS Proceedings · 1997
Origin of surface reflectance spectrum during epitaxyNaoki Kobayashi; Yasuyuki Kobayashi; Kunihiko Uwai · 1997
Structural and Optical Properties of AlGaInN/GaN Grown by MOVPEKobayashi, Yasuyuki; Yamauchi, Yoshiharu; Kobayashi, Naoki · Japanese Journal of Applied Physics · 2003
<i>I</i> <i>n</i> - <i>S</i> <i>i</i> <i>t</i> <i>u</i> Control of Strained Heterostructure GrowthKobayashi, Yasuyuki; Kobayashi, Naoki · Japanese Journal of Applied Physics · 1994
In situ control of heterointerface quality in MOVPE by surface photo-absorptionNaoki Kobayashi; Yasuyuki Kobayashi · 1992
High-Speed CMOS Track/Hold Circuit DesignHaruo Kobayashi; Mohd Asmawi Mohamed Zin; Kazuya Kobayashi; Hao San; Hiroyuki Sato; Jun-Ichi Ichimura; Yoshitaka Onaya; Yuuichi Takahashi; Naoki Kurosawa; Yasuyuki Kimura; Yasushi Yuminaka; Kouji Tanaka; Takao Myono; Fuminori Abe · 2001
Chemical trend observed in anisotropic surface reflectance spectra of MOVPE by surface photoabsorptionNaoki Kobayashi; Yasuyuki Kobayashi; Kunihiko Uwai · 1997
In situ monitoring and control of atomic layer epitaxy by surface photo-absorptionNaoki Kobayashi; Yasuyuki Kobayashi · 1993