Aluminum gettering of cobalt in silicon
- 期刊名称Journal of Applied Physics
- 作者Apel, M.; Hanke, I.; Schindler, R.; Schröter, W.
- 卷第76卷
- 期第7期
- 印刷ISSN0021-8979
- 文件大小438.27KB
- 发表时间1994
- DOI10.1063/1.357339
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