Experimental measurements and numerical simulations of the gas composition in a hot-filament-assisted diamond chemical-vapor-deposition reactor
- 期刊名称Journal of Applied Physics
- 作者McMaster, Mark C.; Hsu, Wen L.; Coltrin, Michael E.; Dandy, David S.
- 卷第76卷
- 期第11期
- 印刷ISSN0021-8979
- 文件大小1722.63KB
- 发表时间1994
- DOI10.1063/1.358525
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