[IEEE 1994 IEEE International Electron Devices Meeting - San Francisco, CA, USA (11-14 Dec. 1994)] Proceedings of 1994 IEEE International Electron Devices Meeting - Progression of multilevel metallization beyond 0.35 micron technology

• 作者Pintchovski, F.
• 文件大小387.06KB
• 发表时间1994
• DOI10.1109/IEDM.1994.383455
• 页码97-100