A conveyance system using air flow based on the concept of distributed micro motion systems
- 期刊名称Journal of Microelectromechanical Systems
- 作者Konishi, S.; Fujita, H.
- 卷第3卷
- 期第2期
- 印刷ISSN1057-7157
- 文件大小551.85KB
- 发表时间1994-6
- DOI10.1109/84.294321
- 页码54-58
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