Ultraviolet photosulfidation of III–V compound semiconductors for electronic passivation
- 期刊名称Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
- 作者Zavadil, Kevin R.
- 卷第12卷
- 期第4期
- 印刷ISSN0734-2101
- 文件大小798.59KB
- 发表时间1994-7
- DOI10.1116/1.579282
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