Ultrahigh vacuum in the semiconductor industry
- 期刊名称Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
- 作者O’Hanlon, John F.
- 卷第12卷
- 期第4期
- 印刷ISSN0734-2101
- 文件大小1075.70KB
- 发表时间1994-7
- DOI10.1116/1.579069
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