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SPIE Proceedings [SPIE Optics Quebec - Quebec City, Canada (Monday 16 August 1993)] Laser-Assisted Fabrication of Thin Films and Microstructures - <title>Synthesis of silicon-based dielectric films by excimer laser ablation</title>

SPIE Proceedings [SPIE Optics Quebec - Quebec City, Canada (Monday 16 August 1993)] Laser-Assisted Fabrication of Thin Films and Microstructures - Synthesis of silicon-based dielectric films by excimer laser ablation

Fogarassy, Eric; Fuchs, Claude; Slaoui, Adelilah; de Unamuno, Salome; Stoquert, Jean-Paul; Marine, Vladimir I.; Lang, Bernard; Boyd, Ian W.
  • 作者Fogarassy, Eric; Fuchs, Claude; Slaoui, Adelilah; de Unamuno, Salome; Stoquert, Jean-Paul; Marine, Vladimir I.; Lang, Bernard; Boyd, Ian W.
  • 卷第2045卷
  • 印刷ISSN0277-786X
  • 文件大小985.84KB
  • 发表时间1994
  • DOI10.1117/12.167554
  • 页码148-159
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