Silicon Wafer Direct Bonding without Hydrophilic Native Oxides
Himi, Hiroaki; Matsui, Masaki; Fujino, Seiji; Hattori, Tadashi
- 期刊名称Japanese Journal of Applied Physics
- 作者Himi, Hiroaki; Matsui, Masaki; Fujino, Seiji; Hattori, Tadashi
- 卷第33卷
- 印刷ISSN0021-4922
- 电子ISSN1347-4065
- 文件大小1897.94KB
- 发表时间1994-1-15
- DOI10.1143/JJAP.33.6
- 页码6-10