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Dielectrics on Silicon Thermally Grown or Annealed in a Nitrogen Rich Environment

Harrison, H. Barry; Misiura, Andrew; Dimitrijev, Sima; Sweatman, Denis; Yao, Z.; Yeow, Y.T.

期刊名称MRS Proceedings
作者Harrison, H. Barry; Misiura, Andrew; Dimitrijev, Sima; Sweatman, Denis; Yao, Z.; Yeow, Y.T.
卷第342卷
电子ISSN1946-4274
文件大小736.65KB
发表时间1994-1
DOI10.1557/proc-342-151