Stress In Molybdenum Films Used For Fea Display Technology
- 期刊名称MRS Proceedings
- 作者Greer, James A.; Pagliuca, Guy F.
- 卷第345卷
- 电子ISSN1946-4274
- 文件大小1605.76KB
- 发表时间1994-1
- DOI10.1557/proc-345-323
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