SPIE Proceedings [SPIE International Conference on Diffractometry and Scatterometry - Warszawa, Poland (Tuesday 24 May 1994)] Diffractometry and Scatterometry - Optical Fourier transform diffractometry for kinoform technology
- 作者Sypek, Maciej; Krukowski, Mariusz; Borowik, Piotr; Pluta, Maksymilian; Szyjer, Mariusz
- 卷第1991卷
- 印刷ISSN0277-786X
- 文件大小718.36KB
- 发表时间1994
- DOI10.1117/12.192041
- 页码51-60
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