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Composition Oscillations in Amorphous Ta—Si Films Produced by Laser Deposition

Composition Oscillations in Amorphous Ta—Si Films Produced by Laser Deposition

S. K. Maksimov; I. D. Khabelashvili; O. V. Uvarov; A. V. Zenkevich; I. V. Verner

作者S. K. Maksimov; I. D. Khabelashvili; O. V. Uvarov; A. V. Zenkevich; I. V. Verner
卷第145卷
期第1期
印刷ISSN1862-6319
文件大小374.62KB
发表时间1994
DOI10.1002/pssa.2211450130

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