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Composition Oscillations in Amorphous Ta<img src=Si Films Produced by Laser Deposition" onerror="this.onerror=null;window.coverFallback&&coverFallback(this);">

Composition Oscillations in Amorphous Ta[BOND]Si Films Produced by Laser Deposition

S. K. Maksimov; I. D. Khabelashvili; O. V. Uvarov; A. V. Zenkevich; I. V. Verner
  • 作者S. K. Maksimov; I. D. Khabelashvili; O. V. Uvarov; A. V. Zenkevich; I. V. Verner
  • 卷第145卷
  • 期第2期
  • 印刷ISSN1862-6319
  • 文件大小247.16KB
  • 发表时间1994
  • DOI10.1002/pssa.2211450257
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