[AIP Stress-induced phenomena in metallization: Second international workshop - Austin, Texas (USA) (29−31 Mar 1993)] AIP Conference Proceedings - Characterization of stress migration in sub-micron metal interconnects

• 作者Fernandes, M. G.; Kawasaki, H.; Klein, J. L.; Jawarani, D.; Subrahmanyan, R.; Yu, T.-K.; Pintchovski, F.
• 卷第305卷
• 文件大小750.92KB
• 发表时间1994
• DOI10.1063/1.45705
• 页码153-164