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Formation of buried a-Si/Al/Si, a-Si/Sb/Si and a-Si/B/Si interfaces and their electrical properties

Formation of buried a-Si/Al/Si, a-Si/Sb/Si and a-Si/B/Si interfaces and their electrical properties

A.V. Zotov; F. Wittmann; J. Lechner; S.V. Ryzhkov; V.G. Lifshits; I. Eisele
  • 作者A.V. Zotov; F. Wittmann; J. Lechner; S.V. Ryzhkov; V.G. Lifshits; I. Eisele
  • 卷第157卷
  • 印刷ISSN0022-0248
  • 文件大小293.07KB
  • 发表时间1995
  • DOI10.1016/0022-0248(95)00354-1
  • 页码344-348
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