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Study of annealed indium tin oxide films prepared by rf reactive magnetron sputtering

Study of annealed indium tin oxide films prepared by rf reactive magnetron sputtering

Li-jian Meng; A Maçarico; R Martins
  • 作者Li-jian Meng; A Maçarico; R Martins
  • 卷第46卷
  • 期第7期
  • 印刷ISSN0042-207X
  • 文件大小812.74KB
  • 发表时间1995
  • DOI10.1016/0042-207x(94)00150-2
  • 页码673-680
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