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[IEEE Eleventh Biennial University/Government/ Industry Microelectronics Symposium - Austin, TX, USA (16-17 May 1995)] Proceedings of the Eleventh Biennial University/Government/ Industry Microelectronics Symposium - Breakdown mechanisms and stress-induced leakage current in ultra-thin oxides and N/sub 2/O oxynitrides

[IEEE Eleventh Biennial University/Government/ Industry Microelectronics Symposium - Austin, TX, USA (16-17 May 1995)] Proceedings of the Eleventh Biennial University/Government/ Industry Microelectronics Symposium - Breakdown mechanisms and stress-induced leakage current in ultra-thin oxides and N/sub 2/O oxynitrides

Chou, A.I.; Lai, K.; Kumar, K.; Chowdhury, P.; Ming-Yin Hao, ; Wei-Ming Chen, ; Gardner, M.; Fulford, J.; Lee, J.C.
  • 作者Chou, A.I.; Lai, K.; Kumar, K.; Chowdhury, P.; Ming-Yin Hao, ; Wei-Ming Chen, ; Gardner, M.; Fulford, J.; Lee, J.C.
  • 文件大小343.28KB
  • 发表时间1995
  • DOI10.1109/UGIM.1995.514122
  • 页码90-93
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