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[IEEE IEEE Micro Electro Mechanical Systems. 1995 - Amsterdam, Netherlands (29 Jan.-2 Feb. 1995)] Proceedings IEEE Micro Electro Mechanical Systems. 1995 - Novel functionality using micro-gaseous devices

[IEEE IEEE Micro Electro Mechanical Systems. 1995 - Amsterdam, Netherlands (29 Jan.-2 Feb. 1995)] Proceedings IEEE Micro Electro Mechanical Systems. 1995 - Novel functionality using micro-gaseous devices

Nathanson, H.C.; Liberman, I.; Freidhoff, C.

作者Nathanson, H.C.; Liberman, I.; Freidhoff, C.
文件大小427.54KB
发表时间1995
DOI10.1109/memsys.1995.472551

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