[IEEE International Conference on Microelectronic Test Structures - Nara, Japan (22-25 March 1995)] Proceedings International Conference on Microelectronic Test Structures - Influence of short circuits on data of contact and via open circuits determined by a novel weave test structure
- 作者Hess, C.; Weiland, L.H.
- 文件大小915.33KB
- 发表时间1995
- DOI10.1109/icmts.1995.513937
- 页码11-16
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