[IEEE 4th International Conference on Solid-State and IC Technology - Beijing, China (24-28 Oct. 1995)] Proceedings of 4th International Conference on Solid-State and IC Technology - Study of methods for measuring mechanical properties of thin films in microelectromechanical systems (MEMS)
- 作者Quanbo Zou, ; Zhijian Li, ; Litian Liu,
- 文件大小179.41KB
- 发表时间1995
- DOI10.1109/icsict.1995.503327
- 页码488-490
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