[IEEE IEEE Micro Electro Mechanical Systems. 1995 - Amsterdam, Netherlands (29 Jan.-2 Feb. 1995)] Proceedings IEEE Micro Electro Mechanical Systems. 1995 - Bulk silicon micro electro mechanical devices fabricated from commercial BESOI substrates
- 作者Benitez, A.; Esteve, J.; Bausells, J.
- 文件大小315.26KB
- 发表时间1995
- DOI10.1109/memsys.1995.472591
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