[IEEE IEEE Micro Electro Mechanical Systems. 1995 - Amsterdam, Netherlands (29 Jan.-2 Feb. 1995)] Proceedings IEEE Micro Electro Mechanical Systems. 1995 - A bidirectional silicon micropump
Zengerle, R.; Kluge, S.; Richter, M.; Richter, A.
- 作者Zengerle, R.; Kluge, S.; Richter, M.; Richter, A.
- 文件大小498.26KB
- 发表时间1995
- DOI10.1109/memsys.1995.472560