Optical and structural investigation of stain-etched silicon
- 期刊名称Applied Physics Letters
- 作者Kalem, Ş.; Rosenbauer, M.
- 卷第67卷
- 期第17期
- 印刷ISSN0003-6951
- 文件大小314.32KB
- 发表时间1995
- DOI10.1063/1.114429
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