Phases and structures of nanocrystalline TiN films
Wang, Dazhi; Wang, Xi; Yang, Genqin; Liu, Xianghui; Jia, Yunbuo; Zhou, Guien; Li, Guofeng
- 期刊名称Journal of Applied Physics
- 作者Wang, Dazhi; Wang, Xi; Yang, Genqin; Liu, Xianghui; Jia, Yunbuo; Zhou, Guien; Li, Guofeng
- 卷第77卷
- 期第7期
- 印刷ISSN0021-8979
- 文件大小1023.40KB
- 发表时间1995
- DOI10.1063/1.358710