New methods for measuring mechanical properties of thin films in micromachining: Beam pull-in voltage (VPI) method and long beam deflection (LBD) method
- 作者Quanbo Zou; Zhijian Li; Litian Liu
- 卷第48卷
- 期第2期
- 印刷ISSN0924-4247
- 文件大小505.85KB
- 发表时间1995
- DOI10.1016/0924-4247(95)00987-6
- 页码137-143
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