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Fabrication and properties of a Si-based high-sensitivity microcalorimetric gas sensor

M. Zanini; J.H. Visser; L. Rimai; R.E. Soltis; A. Kovalchuk; D.W. Hoffman; E.M. Logothetis; U. Bonne; L. Brewer; O.W. Bynum; M.A. Richard

作者M. Zanini; J.H. Visser; L. Rimai; R.E. Soltis; A. Kovalchuk; D.W. Hoffman; E.M. Logothetis; U. Bonne; L. Brewer; O.W. Bynum; M.A. Richard
卷第48卷
期第3期
印刷ISSN0924-4247
文件大小548.36KB
发表时间1995
DOI10.1016/0924-4247(95)01000-9
页码187-192