2D imaging ellipsometric microscope
- 期刊名称Review of Scientific Instruments
- 作者Pak, Hyuk K.; Law, Bruce M.
- 卷第66卷
- 期第10期
- 印刷ISSN0034-6748
- 文件大小879.18KB
- 发表时间1995
- DOI10.1063/1.1146183
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