[IEEE IEEE Micro Electro Mechanical Systems. 1995 - Amsterdam, Netherlands (29 Jan.-2 Feb. 1995)] Proceedings IEEE Micro Electro Mechanical Systems. 1995 - A novel approach to assembly and interconnection for micro electro mechanical systems
- 作者Suga, T.; Hosoda, N.
- 文件大小527.82KB
- 发表时间1995
- DOI10.1109/memsys.1995.472589
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