SPIE Proceedings [SPIE Micromachining and Microfabrication - Austin, TX (Monday 23 October 1995)] Micromachining and Microfabrication Process Technology - Advanced silicon etching using high-density plasmas
Bhardwaj, Jy K.; Ashraf, Huma; Markus, Karen W.
- 作者Bhardwaj, Jy K.; Ashraf, Huma; Markus, Karen W.
- 卷第2639卷
- 印刷ISSN0277-786X
- 文件大小752.53KB
- 发表时间1995
- DOI10.1117/12.221279
- 页码224-233