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Multilayered Electron Beam Resist Process for Fabrication of Ultrasmall Tunnel Junctions
Wada, Toshimi; Hirayama, Motoki; Haraichi, Satoshi; Ishii, Ken'ichi; Hiroshima, Hiroshi; Masanori Komuro, Masanori Komuro
- 期刊名称Japanese Journal of Applied Physics
- 作者Wada, Toshimi; Hirayama, Motoki; Haraichi, Satoshi; Ishii, Ken'ichi; Hiroshima, Hiroshi; Masanori Komuro, Masanori Komuro
- 卷第34卷
- 印刷ISSN0021-4922
- 电子ISSN1347-4065
- 文件大小134.53KB
- 发表时间1995-12-01
- DOI10.7567/JJAP.34.6961