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              Multilayered Electron Beam Resist Process for Fabrication of Ultrasmall Tunnel Junctions

S i O 2 / P o l y - S i Multilayered Electron Beam Resist Process for Fabrication of Ultrasmall Tunnel Junctions

Wada, Toshimi; Hirayama, Motoki; Haraichi, Satoshi; Ishii, Ken'ichi; Hiroshima, Hiroshi; Masanori Komuro, Masanori Komuro
  • 期刊名称Japanese Journal of Applied Physics
  • 作者Wada, Toshimi; Hirayama, Motoki; Haraichi, Satoshi; Ishii, Ken'ichi; Hiroshima, Hiroshi; Masanori Komuro, Masanori Komuro
  • 卷第34卷
  • 印刷ISSN0021-4922
  • 电子ISSN1347-4065
  • 文件大小134.53KB
  • 发表时间1995-12-01
  • DOI10.7567/JJAP.34.6961
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