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[IEEE IEEE Micro Electro Mechanical Systems. 1995 - Amsterdam, Netherlands (29 Jan.-2 Feb. 1995)] Proceedings IEEE Micro Electro Mechanical Systems. 1995 - An electrochemical micro actuator

[IEEE IEEE Micro Electro Mechanical Systems. 1995 - Amsterdam, Netherlands (29 Jan.-2 Feb. 1995)] Proceedings IEEE Micro Electro Mechanical Systems. 1995 - An electrochemical micro actuator

Hamberg, M.W.; Neagu, C.; Gardeniers, J.G.E.; Ijntema, D.J.; Elwenspoek, M.

作者Hamberg, M.W.; Neagu, C.; Gardeniers, J.G.E.; Ijntema, D.J.; Elwenspoek, M.
文件大小446.06KB
发表时间1995
DOI10.1109/memsys.1995.472545

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