Silicon Growth Rate Enhancement Using Trisilane in a Laser Direct-Writing Technique
- 期刊名称MRS Proceedings
- 作者Boughaba, S.; Auvert, G.
- 卷第397卷
- 电子ISSN1946-4274
- 文件大小340.48KB
- 发表时间1995-1
- DOI10.1557/proc-397-595
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