Improvement of the quality of a-SiGe:H films
- 作者M. Sadamoto; K. Saitoh; N. Ishiguro; N. Yanagawa; H. Tanaka; S. Fukuda; Y. Ashida; N. Fukuda
- 印刷ISSN0022-3093
- 文件大小254.64KB
- 发表时间1996
- DOI10.1016/0022-3093(96)00055-5
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