PMMA as an X-ray resist for micro-machining application: Latent image formation and thickness losses

• 作者Y. Vladimirsky; O. Vladimirsky; K.J. Morris; J.M. Klopf; G.M. Calderon; V. Saile
• 卷第30卷
• 印刷ISSN0167-9317
• 文件大小1747.43KB
• 发表时间1996
• DOI10.1016/0167-9317(95)00305-3
• 页码543-546