The reduction of copper oxide thin films with hydrogen plasma generated by an atmospheric-pressure glow discharge
- 期刊名称Journal of Physics D: Applied Physics
- 作者Sawada, Yasushi; Tamaru, Hiroshi; Kogoma, Masuhiro; Kawase, Motoaki; Hashimoto, Kenji
- 卷第29卷
- 期第10期
- 印刷ISSN0022-3727
- 电子ISSN1361-6463
- 文件大小312.46KB
- 发表时间1996-10-14
- DOI10.1088/0022-3727/29/10/003
- 页码2539-2544
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