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[IEEE 1996 IEEE Hong Kong Electron Devices Meeting - Hong Kong (29 June 1996)] Proceedings 1996 IEEE Hong Kong Electron Devices Meeting - HF wet etching of oxide after ion implantation

[IEEE 1996 IEEE Hong Kong Electron Devices Meeting - Hong Kong (29 June 1996)] Proceedings 1996 IEEE Hong Kong Electron Devices Meeting - HF wet etching of oxide after ion implantation

Lianjun Liu, ; Pey, K.L.; Pangdow Foo,

作者Lianjun Liu, ; Pey, K.L.; Pangdow Foo,
文件大小301.35KB
发表时间1996
DOI10.1109/hkedm.1996.566296
页码17-20

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