[IEEE 1996 IEEE International SOI Conference Proceedings - Sanibel Island, FL, USA (30 Sept.-3 Oct. 1996)] 1996 IEEE International SOI Conference Proceedings - Technique to form ultrathin buried oxides in Si by O/sup +/-implantation
- 作者Holland, O.W.; Sadana, D.K.
- 文件大小356.84KB
- 发表时间1996
- DOI10.1109/soi.1996.552537
- 页码148-149
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