[IEEE 1996 International Semiconductor Conference. 19th Edition. CAS'96 Proceedings - Sinaia, Romania (9-12 Oct. 1996)] 1996 International Semiconductor Conference. 19th Edition. CAS'96 Proceedings - Zn/sup +//P/sup +/ and Zn/sup +//As/sup +/ co-implantation in InP single crystals

Ursaki, V.V.; Tiginyanu, I.M.; Ichizli, V.M.; Terletsky, A.I.; Pyshnaya, N.B.; Radautsan, S.I.

作者Ursaki, V.V.; Tiginyanu, I.M.; Ichizli, V.M.; Terletsky, A.I.; Pyshnaya, N.B.; Radautsan, S.I.
卷第2卷
文件大小350.88KB
发表时间1996
DOI10.1109/smicnd.1996.557405
页码401-404

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