Electron heating in inductively coupled discharges
- 期刊名称Physics of Plasmas
- 作者Shaing, K. C.
- 卷第3卷
- 期第9期
- 印刷ISSN1070-664X
- 文件大小325.23KB
- 发表时间1996
- DOI10.1063/1.871598
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