Oxygen precipitates in annealed CZ silicon wafers detected by SIRM and FTIR spectroscopy
- 作者Caroline Veve; Michael Stemmer; Santo Martinuzzi
- 卷第36卷
- 印刷ISSN0921-5107
- 文件大小333.39KB
- 发表时间1996
- DOI10.1016/0921-5107(95)01303-2
- 页码200-203
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