Deposition of Co-Cr films with excellent c-axis orientation and uniform thickness for rigid disks using compact sputtering apparatus

• 期刊名称IEEE Transactions on Magnetics
• 作者Kitamoto, Y.; Abe, M.; Naoe, M.
• 卷第32卷
• 期第5期
• 印刷ISSN0018-9464
• 文件大小264.81KB
• 发表时间1996
• DOI10.1109/20.539076
• 页码4547-4549