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[IEEE ICSE '96. 1996 IEEE International Conference on Semiconductor Electronics. Proceedings - Penang, Malaysia (26-28 Nov. 1996)] ICSE '96. 1996 IEEE International Conference on Semiconductor Electronics. Proceedings - Optimization of doping process on P-type wafer using spin-on technique

[IEEE ICSE '96. 1996 IEEE International Conference on Semiconductor Electronics. Proceedings - Penang, Malaysia (26-28 Nov. 1996)] ICSE '96. 1996 IEEE International Conference on Semiconductor Electronics. Proceedings - Optimization of doping process on P-type wafer using spin-on technique

Lim, C.S.; Kuan, S.H.; Ibrahim, K.

作者Lim, C.S.; Kuan, S.H.; Ibrahim, K.
文件大小228.23KB
发表时间1996
DOI10.1109/smelec.1996.616498
页码280-283

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