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[IEEE Proceedings of Ninth International Workshop on Micro Electromechanical Systems - San Diego, CA, USA (1996.02.11-1996.02.15)] Proceedings of Ninth International Workshop on Micro Electromechanical Systems MEMSYS-96 - Proceedings of Ninth International Workshop on Micro Electromechanical Systems

[IEEE Proceedings of Ninth International Workshop on Micro Electromechanical Systems - San Diego, CA, USA (1996.02.11-1996.02.15)] Proceedings of Ninth International Workshop on Micro Electromechanical Systems MEMSYS-96 - Proceedings of Ninth International Workshop on Micro Electromechanical Systems

文件大小627.04KB
发表时间1996
DOI10.1109/MEMSYS.1996.493818

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