Transmission Electron Microscopy Observation of Polymorphic Epitaxial Growth of Y S i _{2- x} Layer in A l (001)/ Y S i _{2- x} / S i (001) Systems

• 期刊名称Japanese Journal of Applied Physics
• 作者Noya, Atsushi; Takeyama, Mayumi; Sasaki, Katsutaka; Aoyagi, Eiji; Hiraga, Kenji
• 卷第35卷
• 印刷ISSN0021-4922
• 电子ISSN1347-4065
• 文件大小2040.63KB
• 发表时间1996-10-15
• DOI10.1143/JJAP.35.5428
• 页码5428-5431