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International comparison of roundness profiles with nanometric accuracy

International comparison of roundness profiles with nanometric accuracy

H. Haitjema; H. Bosse; M. Frennberg; A. Sacconi; R. Thalmann

作者H. Haitjema; H. Bosse; M. Frennberg; A. Sacconi; R. Thalmann
文件大小94.75KB
发表时间1996
DOI10.1088/0026-1394/33/1/9

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