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Interface properties of PNxInP structures by in-situ remote plasma processes

Interface properties of PNxInP structures by in-situ remote plasma processes

Takashi Sugino; Yoshifumi Sakamoto; Takashi Miyazaki; Junji Shirafuji

作者Takashi Sugino; Yoshifumi Sakamoto; Takashi Miyazaki; Junji Shirafuji
印刷ISSN0169-4332
文件大小401.04KB
发表时间1996
DOI10.1016/s0169-4332(96)00182-1
页码428-433

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